| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid crystal device by which dielectric films having a small difference in film quality from each other can be formed on mutually opposing surfaces of a pair of substrates holding a liquid crystal layer therebetween.SOLUTION: In manufacturing a liquid crystal panel, in a formation step S2 of an alignment film 16, a monitoring result of deposition speed is fed back to control deposition conditions so that the deposition speed becomes a target value, and accordingly, the alignment film 16 having a desired film quality can be formed. In a formation step of an alignment film 26, deposition conditions are temporally changed in the same way as in log data in which temporally change of the deposition conditions are recorded in the formation step of the alignment film 16, and accordingly, the alignment film 26 and the alignment film 16 have extremely small difference in film quality from each other. |
