| 摘要 |
A film-forming apparatus (100) and method capable of film lamination with superior evenness and good followability regardless of the size, shape and number of articles being laminated. The film-forming apparatus (100) provided has a first chamber (10, 11) that is provided with a heating means (50, 51) and that is capable of maintaining a vacuum or a pressurized state, a second chamber (20, 21) that is disposed so as to be able to be joined to, and separated from, the first chamber (10, 11), that is provided with a movable supporting table (60, 61) on which an article (300, 310, 320) is supported and that is capable of maintaining a vacuum or a pressurized state, a frame-like film holding member (30, 31) that is disposed between the first chamber (10, 11) and the second chamber (20, 21) and that holds a film (200, 210), and an auxiliary film pressing tool (40, 41, 42) having a film pressing part (42a) that inhibits lifting of the film (200, 210) when the film is laminated on a surface of the article (300, 310, 320). |
