发明名称 PRODUCTION MANAGEMENT APPARATUS, PRODUCTION MANAGEMENT SYSTEM AND PRODUCTION MANAGEMENT PROGRAM OF ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a production management apparatus, a production management system and a production management program of an electronic device for managing the management items efficiently with high accuracy.SOLUTION: The production management apparatus of an electronic device generates a model function by using a database where the manufacturing condition values of the components of an electronic device and the characteristics of the components manufactured are associated with each other, and determines first manufacturing condition values. A squared prediction error is then calculated using the measured values of characteristics when the components are actually formed using the first manufacturing condition values thus determined. The model function is not corrected but the first manufacturing condition values become the second manufacturing condition values if the squared prediction error is larger than a reference value, otherwise a second model function is generated using the database to which the values when actually forming the components are added, and then the second manufacturing condition values are determined based on the second model function.
申请公布号 JP2013258338(A) 申请公布日期 2013.12.26
申请号 JP20120134282 申请日期 2012.06.13
申请人 TOSHIBA CORP 发明人 HUANG LIN TIEN
分类号 H01L21/31;G05B19/418 主分类号 H01L21/31
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