发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve characteristics of a semiconductor device.SOLUTION: A semiconductor device comprises: a lateral diffusion MISFET having a gate electrode G, a source region and a drain region; a source plug P1S which is arranged in a first region located on one side of the gate electrode G and electrically connected to the source region; and source wiring M1S. The source wiring M1S includes: field plate parts FP extending at an end on the gate electrode G side over an upside of the gate electrode G to an upside on the drain region side; and a notched part N. By providing the field plate parts FP, capacitance (Cgd) between the gate electrode G and the drain region can be reduced. Further, by providing the notched part N, capacitance (Cgs) between the gate electrode G and the source region can be reduced. In addition, Cgd and Cgs can be adjusted.
申请公布号 JP2013258344(A) 申请公布日期 2013.12.26
申请号 JP20120134377 申请日期 2012.06.14
申请人 RENESAS ELECTRONICS CORP 发明人 IIDA TETSUYA
分类号 H01L21/336;H01L21/3205;H01L21/768;H01L23/522;H01L29/06;H01L29/41;H01L29/78 主分类号 H01L21/336
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