发明名称 Durable Non-Wetting Coating on Fluid Ejector
摘要 A method of forming a nozzle plate of a fluid ejection device includes etching a bore in the first side of the multi-layer substrate, depositing a liner in the bore, removing a layer from a second side of the multi-layer substrate, wherein the removing exposes a closed end of the liner, applying a non-wetting coating to the closed end of the liner and an area surrounding the closed end of the liner, and removing the closed end of the liner, wherein removing the closed end of the liner opens a nozzle.
申请公布号 US2013344630(A1) 申请公布日期 2013.12.26
申请号 US201313974794 申请日期 2013.08.23
申请人 FUJIFILM CORPORATION 发明人 NEPOMNISHY MARK;BRABANDER GREGORY DE;BIBL ANDREAS
分类号 H01L29/66 主分类号 H01L29/66
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