| 摘要 |
An integrated optoelectronic module comprising: a semiconductor substrate; a single-mode optical waveguide comprising a semiconductor with a signal input section at a first end; a multi-mode optical waveguide comprising a semiconductor connected to a second end of the single-mode optical waveguide; and a photodiode disposed on and adjacent to the multi-mode interferometer waveguide and having at least one optical absorption layer section, wherein the single-mode optical waveguide, the multi-mode optical waveguide, and the photodiode being stacked on the semiconductor substrate, wherein the multi-mode interferometer waveguide comprises a reflection section formed by partly grooving the multi-mode interferometer waveguide, and an optical signal having propagated through the multi-mode interferometer waveguide is reflected by the reflection section and focused on the optical absorption layer section. |
