摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter substrate capable of enhancing color reproducibility.SOLUTION: There is provided a method for manufacturing a color filter substrate provided on one of a pair of substrates for holding a liquid crystal layer, the method comprising the steps of: forming a tungsten silicide film and a resist film on a second substrate 20a; forming a resist pattern 42; forming a light shielding film 41 by applying etching treatment to the tungsten silicide film using the resist pattern 42 as a mask; and forming a recess 35 filled with a color filter material by applying etching treatment to the second substrate 20a using the resist pattern 42 and the light shielding film 41 as a mask. |