发明名称 SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Provided is a method for manufacturing a semiconductor device, which prevents waste generation from being caused peeling of films and prevents failure of peeling from being caused by waste due to peeling of films. A first semiconductor substrate is used which has a structure in which a peeling layer is not formed in a section subjected to a first dividing treatment, so that the peeling layer is not exposed at the end surface of a second semiconductor substrate when the second semiconductor substrate is cut out of the first semiconductor substrate. In addition, a supporting material is provided on a layer to be peeled of the second semiconductor substrate before the second semiconductor substrate is subjected to a second dividing treatment.
申请公布号 US2013344681(A1) 申请公布日期 2013.12.26
申请号 US201313962326 申请日期 2013.08.08
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 CHIDA AKIHIRO;OIKAWA YOSHIAKI;KAWANABE CHIHO
分类号 H01L21/78 主分类号 H01L21/78
代理机构 代理人
主权项
地址