| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacture method for a micromirror array capable of easily producing the micromirror array having a high degree of design freedom of a convex unit optical element and creating a bright and high-luminance image.SOLUTION: The method for manufacturing a micromirror array according to the present invention comprises a cutting step in which a plurality of mutually parallel linear grooves having a depth of 50 to 500 μm are sequentially formed in two directions orthogonal to each other on a prescribed surface of a planar substrate (a workpiece W) mounted on a work stage (S) with a prescribed distance apart from each other, by using a rotary blade (a blade B) of a cutting machine. Thereby, a unit optical element having the shape of a fine quadrangular prism can be formed, which has a high ratio of 1.5 or more for the height of the element (v) in the thickness direction of the substrate to the width of the element (h) in the surface direction of the substrate (an aspect ratio v/h). |
