发明名称 WAFER TESTING SYSTEMS AND ASSOCIATED METHODS OF USE AND MANUFACTURE
摘要 A wafer testing system and associated methods of use an manufacture are disclosed herein. In one embodiment, the wafer testing system includes an assembly for releaseably attaching a wafer to a wafer translator and the wafer translator to an interposer by means of separately operable vacuums, or pressure differentials. The assembly includes a wafer translator support ring coupled to the wafer translator, wherein a first flexible material extends from the wafer translator support ring so as to enclose the space between the wafer translator and the interposer so that the space may be evacuated by a first vacuum through one or more first evacuation paths. The assembly can further include a wafer support ring coupled to the wafer and the chuck, wherein a second flexible material extends from wafer support ring so as to enclose the space between the wafer and the wafer translator so that the space may be evacuated by a second vacuum through one or more second evacuation pathways.
申请公布号 KR20130138793(A) 申请公布日期 2013.12.19
申请号 KR20137011041 申请日期 2011.09.28
申请人 ADVANCED INQUIRY SYSTEMS, INC. 发明人 DURBIN AARON;KEITH DAVID;JOHNSON MORGAN T.
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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