发明名称 SEMICONDUCTOR DIE SINGULATION METHOD
摘要 In one embodiment, semiconductor die are singulated from a semiconductor wafer by forming trenches along singulation lines and initiating a cracks from within the trenches, which propagate through the semiconductor wafer in a more controlled manner.
申请公布号 US2013337633(A1) 申请公布日期 2013.12.19
申请号 US201213526140 申请日期 2012.06.18
申请人 SEDDON MICHAEL J. 发明人 SEDDON MICHAEL J.
分类号 H01L21/78 主分类号 H01L21/78
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