| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser irradiating apparatus which makes optical intensity of a laser beam uniform in an irradiation angle direction, and which is capable of dynamically changing an irradiation angle of the laser beam.SOLUTION: A laser irradiating apparatus includes: a laser oscillation part 1 for oscillating a laser beam; an adjustment lens 2 and a drive stage controller 7 for adjusting a spread angle of the laser beam oscillated from the laser oscillation part 1, in an emission direction; and a drive mirror 3 and a drive mirror controller 6 for superposing, by making use of reflection, luminous fluxes of the laser beam whose spread angle in the emission direction is adjusted by the adjustment lens 2 and the drive stage controller 7, to convert an optical intensity distribution in an irradiation angle direction, and for adjusting an emission angle of irradiated light into which optical intensity distribution is converted, to a preset irradiation angle. |
