发明名称 METHODS AND APPARATUS PROVIDING THERMAL ISOLATION OF PHOTONIC DEVICES
摘要 Described embodiments include photonic integrated circuits and systems with photonic devices, including thermal isolation regions for the photonic devices. Methods of fabricating such circuits and systems are also described.
申请公布号 WO2013188542(A1) 申请公布日期 2013.12.19
申请号 WO2013US45421 申请日期 2013.06.12
申请人 MICRON TECHNOLOGY, INC.;MEADE, ROY;GURTEJ, SANDHU 发明人 MEADE, ROY;GURTEJ, SANDHU
分类号 G02B6/12 主分类号 G02B6/12
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