| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration gyro having a structure for offsetting a quadrature error generated due to structural asymmetry caused by manufacturing variation, when input angular velocity is zero, and having correction means of a bias value.SOLUTION: In order to give reverse torque for offsetting a quadrature error, to a mass body to be detected, left side interdigital electrodes 151a and 151b for correction are fixed on a substrate 102 so as to be adjacent to a left side drive mass body 104, and there are provided interdigital electrodes 153a and 153b facing the left side interdigital electrodes 151a and 151b for correction respectively, at an inner peripheral part of a frame member forming the left side drive mass body 104. Electrostatic force to offset leaked rotational displacement of the mass body to be detected, occurring when angular velocity input is zero, is generated by applying DC voltage on the electrodes for correction. |
