发明名称 |
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTION OF DEFECTS WITHIN INSPECTION IMAGES |
摘要 |
An analysis system for detection of defects within an inspection image of an inspected object, the inspection image comprising a plurality of pixels, the system including: a computerized segmentation module configured to segmentize the inspection image based on multiple anchor locations and on a mask which defines multiple mask-segments, by assigning each part out of multiple parts of the inspection image to a respective image-segment selected out of a multiple image segments, wherein the multiple image segments correspond to at least one mask-segment of said multiple mask-segments; and a defect detection processor configured to determine a presence of a defect in the inspection image based on the segmentation at least by assessing each pixel out of a plurality of pixels of the inspection image. |
申请公布号 |
US2013336575(A1) |
申请公布日期 |
2013.12.19 |
申请号 |
US201213517520 |
申请日期 |
2012.06.13 |
申请人 |
DALLA-TORRE MICHELE;SHABAT GIL;DAFNI ADI;BATIKOFF AMIT;APPLIED MATERIALS ISRAEL LTD. |
发明人 |
DALLA-TORRE MICHELE;SHABAT GIL;DAFNI ADI;BATIKOFF AMIT |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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