发明名称 SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTION OF DEFECTS WITHIN INSPECTION IMAGES
摘要 An analysis system for detection of defects within an inspection image of an inspected object, the inspection image comprising a plurality of pixels, the system including: a computerized segmentation module configured to segmentize the inspection image based on multiple anchor locations and on a mask which defines multiple mask-segments, by assigning each part out of multiple parts of the inspection image to a respective image-segment selected out of a multiple image segments, wherein the multiple image segments correspond to at least one mask-segment of said multiple mask-segments; and a defect detection processor configured to determine a presence of a defect in the inspection image based on the segmentation at least by assessing each pixel out of a plurality of pixels of the inspection image.
申请公布号 US2013336575(A1) 申请公布日期 2013.12.19
申请号 US201213517520 申请日期 2012.06.13
申请人 DALLA-TORRE MICHELE;SHABAT GIL;DAFNI ADI;BATIKOFF AMIT;APPLIED MATERIALS ISRAEL LTD. 发明人 DALLA-TORRE MICHELE;SHABAT GIL;DAFNI ADI;BATIKOFF AMIT
分类号 G06K9/00 主分类号 G06K9/00
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