发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress semiconductor device test cost.SOLUTION: When performing an electric test (S105) of a semiconductor device (2) in a method of manufacturing the semiconductor device, signal output probe needles (25) of a probe card 24 that is mounted on a tester(20) are connected in common to predetermined test terminals (CP1, etc.) in a plurality of units. The method of manufacturing the semiconductor device includes a following step: instructing the semiconductor device to output a signal in parallel to the signal output probe needles (25_1 and 25_7) that share one of the predetermined test terminals (CP1), thereby determining the propriety of the semiconductor device on the basis of a signal voltage of a signal that is input to the predetermined test terminal.
申请公布号 JP2013253839(A) 申请公布日期 2013.12.19
申请号 JP20120128981 申请日期 2012.06.06
申请人 RENESAS ELECTRONICS CORP 发明人 MINAMI KOICHI;SUZUKI SEIICHI;TANIGUCHI KOJI;YASUMA TAKASHI;HARUHARA MAKOTO;SASAKI TAKU
分类号 G01R31/28;G01R31/26;G01R31/319 主分类号 G01R31/28
代理机构 代理人
主权项
地址
您可能感兴趣的专利