摘要 |
A micromechanical electromagnetic actuator may have two separate components: a flux-generating portion and a separate movable structure. The flux-generating portion may have a plurality of conductive coils wound around a magnetically permeable material. Each coil generates a magnetic field along its axis, which is different for each of the coils. The adjacent movable structure may include magnetically permeable features, one inlaid in the movable structure and other stationary features which focus the flux produced by the flux-generating mechanism across a gap between the stationary features. By energizing each coil sequentially, a push-pull motion in the actuator may result from the force of the magnetically permeable features. This push-pull actuator may be particularly effective when used as a pumping element in a drug delivery system, or other fluidic pumping system. |