发明名称 |
LIGHT RECEIVING ELEMENT, SEMICONDUCTOR EPITAXIAL WAFER, DETECTION DEVICE, AND METHOD FOR MANUFACTURING LIGHT RECEIVING ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a light receiving element and the like which have high light receiving sensitivity from a near-infrared region to a mid-infrared region, and can stably obtain high quality while maintaining economical efficiency.SOLUTION: The light receiving element includes: an InP substrate which is transparent to light in a wavelength of 3 μm to 12 μm; an intermediate layer epitaxially grown on the InP substrate; a GaSb buffer layer located in contact with the intermediate layer; and a light receiving layer which is epitaxially grown on the GaSb buffer layer and has a type 2 multiple quantum well structure. The GaSb buffer layer is epitaxially grown on the intermediate layer while exceeding a range of a formal lattice matching condition. |
申请公布号 |
JP2013251341(A) |
申请公布日期 |
2013.12.12 |
申请号 |
JP20120123515 |
申请日期 |
2012.05.30 |
申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
MIURA KOHEI;INADA HIROSHI;INOGUCHI YASUHIRO;SAITO ITARU |
分类号 |
H01L31/10;H01L21/205;H01L27/144;H01L27/146 |
主分类号 |
H01L31/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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