| 摘要 |
A bias power supply device includes: a temperature detecting unit; a control signal generation unit generating and outputting an output frequency setting signal for setting a frequency of an alternating current power in accordance with a repetition frequency and a resonance frequency signal being set at a lower or higher repetition frequency according to the measured temperature; a waveform signal generation circuit generating a waveform signal for pulse-width modulation having a time constant for rising set by capacity and resistance based on the resonance frequency signal; a modulation circuit generating a pulse-width-modulated modulation signal based on the waveform signal and the output frequency setting signal; a switching circuit driven by the modulation signal; and a transformer having a first winding and a second winding, and supplying an alternating current power with a repetition frequency of the output frequency setting signal to an external load connected to the second winding. |
