发明名称 METHOD FOR COATING MICRO- AND/OR NANO-STRUCTURED STRUCTURAL SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for coating a microstructured and/or nanostructured structured substrate.SOLUTION: A method for coating a microstructured and/or nanostructured structured substrate includes the steps of: placing a structured substrate into a vacuum chamber; evacuating the vacuum chamber; introducing a coating substance from a reservoir for the coating substance into the vacuum chamber before and/or while and/or after the vacuum chamber is evacuated, the coating substance having a solvent content of at least 25 vol.%; distributing the coating substance on the structured substrate as a fluid film; elevating the pressure in the vacuum chamber while and/or after the coating substance is introduced; and evaporating the solvent by means of a method of homogeneously distributing the coating substance on the topography on a surface of the structured substrate.
申请公布号 JP2013248617(A) 申请公布日期 2013.12.12
申请号 JP20130184894 申请日期 2013.09.06
申请人 THALLNER ERICH 发明人 THALLNER ERICH
分类号 B05D3/12;B81C99/00 主分类号 B05D3/12
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