发明名称 Probe Card for Simultaneously Testing Multiple Dies
摘要 In accordance with an embodiment, a probe card comprises a contact pad interface comprising front side contacts and back side contacts electrically coupled together. The front side contacts are arranged to simultaneously electrically couple respective bumps of a plurality of dies on a wafer, and the back side contacts are arranged to electrically couple respective contacts of a testing structure.
申请公布号 US2013328586(A1) 申请公布日期 2013.12.12
申请号 US201313969284 申请日期 2013.08.16
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHOU YOU-HUA;LAI YI-JEN
分类号 G01R1/073 主分类号 G01R1/073
代理机构 代理人
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