| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal production apparatus capable of protecting an electrode supporting a cylindrical heater from a raw material melt running-out from a crucible.SOLUTION: A single crystal production apparatus by Czochralski method includes a crucible for storing a raw material melt, a cylindrical heater for heating the raw material melt by enclosing the crucible, a main chamber for housing them, an electrode for supporting the cylindrical heater by being inserted from the bottom of the main chamber and supplying the power, and a run-out pan disposed on the bottom of the main chamber, for storing the raw material melt leaking from the crucible. In the single crystal production apparatus, a run-out cover for preventing the electrode from being splashed with the raw material melt leaking from the crucible is disposed on a furthermore lower position than the crucible and on a furthermore upper position than the electrode. |
