发明名称 |
THIN FILM TRANSISTOR, THIN FILM TRANSISTOR DISPLAY BOARD EQUIPPED WITH THE SAME AND MANUFACTURING METHOD OF THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a thin film transistor which reduces parasitic capacitance between a gate electrode of a thin film transistor and a source region or a drain region of a semiconductor layer and improves characteristics of the thin film transistor; and provide a thin film transistor display board and a manufacturing method of the same, which drop a kickback voltage caused by parasitic capacitance thereby to reduce a signal delay and a signal distortion.SOLUTION: A thin film transistor comprises: a gate electrode; a gate insulation film located above or below the gate electrode; a channel region which overlaps the gate electrode across the gate insulation film; and a source region and a drain region which are located in the same layer with the channel region and connected with the channel region and which lie opposite to each other across the channel region as a center. Each of the channel region, the source region and the drain region includes an oxide semiconductor. A carrier concentration in each of the source region and the drain region is larger than a carrier concentration in the channel region. |
申请公布号 |
JP2013251526(A) |
申请公布日期 |
2013.12.12 |
申请号 |
JP20130027373 |
申请日期 |
2013.02.15 |
申请人 |
SAMSUNG DISPLAY CO LTD |
发明人 |
LEE SEIKUN;SONG JUN-HO;YEO RYUN-JONG;JUNG HWA DONG |
分类号 |
H01L29/786;G02F1/1368;G09F9/00;G09F9/30;H01L21/336;H01L51/50 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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