| 摘要 |
<p>The invention relates to a device for pulsed laser deposition, which device comprises:
- a substrate mount with a substrate mounting surface for a substrate;
- a target mount for a piece of target material arranged substantially parallel to and at a distance from the substrate mount;
- a laser device for directing a laser beam on a piece of target material mounted on the target mount, such that a plasma plume of target material is generated and deposits on the substrate; and
- a first shield arranged between the substrate mount and the target mount for shielding the target, wherein the first shield comprises at least one passage opening for passage of at least the generated plasma plume; and
- a rotating wheel having at least one passage opening extending from one side of the wheel to the opposite side, wherein, seen in the direction perpendicular to shield surface with the passage opening, the wheel overlaps with the passage opening in the shield and the path of the passage opening in the wheel overlaps with the passage opening in the shield.</p> |
