METHOD OF FORMING AN ACTIVE PATTERN, DISPLAY SUBSTRATE BEING FORMED USING THE SAME AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE

摘要

The present invention relates to a forming method of active patterns comprising the following steps: forming a gate metal layer on a base substrate; forming gate lines and gate patterns placed apart from the gate lines by patterning the gate metal layer; forming a first interface corresponding to an area in which the gate patterns are formed by coating insulating layer on the base substrate o which gate lines and patters are formed; forming a second interface corresponding to the first substrate by forming a semiconductor layer on the base substrate on which the gate insulating layer is formed; and crystalizing the semiconductor layer on the second interface with laser beams. By forming active patterns through the gate patterns and laser crystallization methods, manufacturing process can be simplified, and manufacturing costs can be reduced while producing active patterns of high quality on a desirable spot.