| 摘要 |
<p>An organic EL device manufacturing method includes a vapor deposition step of supplying a substrate, and while moving the substrate with a side thereof, on which an electrode layer is not provided, in contact with a surface of a can roller that rotates, discharging an evaporated organic layer forming material from a nozzle of a vapor deposition source to form an organic layer over a side of the substrate on which the electrode layer is provided, wherein the vapor deposition step is performed while, using a distance measuring section capable of measuring a first distance to the substrate supported by the can roller, and a position adjusting section capable of adjusting a second distance between the nozzle of the vapor deposition source and a surface of the substrate, control is performed by the position adjusting section so that the second distance is constant.</p> |
