| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor that can prevent crosstalk from being generated when acceleration or force is measured and can remove interference of a resonance mode when an angular velocity is measured.SOLUTION: A sensor 100 includes a mass body 110, a fixed part 120 installed to be isolated from the mass body 110, a first flexible part 130 connecting the mass body 110 and the fixed part 120 to each other in a Y-axial direction, and a second flexible part 140 connecting the mass body 110 and the fixed part 120 to each other in an X-axial direction, the first flexible part 130 having an X-axial width larger than a Z-axial thickness and the second flexible part 140 having a Z-axial thickness larger than a Y-axial width. |
