发明名称 ACCELERATION SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a small size and high sensitive acceleration sensor used on a vehicle or portable terminal.SOLUTION: The acceleration sensor is configured including at least: a frame 22 having a hollow area 21 thereinside; first beam portions 23 and 24 extending from an inner face of the frame 22; second beam portions 25 and 26 extending from the inner face of the frame 22 located at the opposite side of the first beam portions 23 and 24 being interposed by the hollow area 21; a first weight 27 supported by the first beam portions 23 and 24; a second weight 28 supported by the second beam portions 25 and 26; a connection section 29 connecting the first weight 27 and the second weight 28; and detectors 31, 32, 33 and 34 provided to the first beam portions 23 and 24 and the second beam portions 25 and 26, each detecting the acceleration on the basis of the deflection of the first beam portions 23 and 24 and the second beam portions 25 and 26 caused by a relative displacement between the first weight 27 and the second weight 28.
申请公布号 JP2013246033(A) 申请公布日期 2013.12.09
申请号 JP20120119660 申请日期 2012.05.25
申请人 PANASONIC CORP 发明人 KEK KHAI JUN;AIZAWA HIROYUKI;IMANAKA TAKASHI
分类号 G01P15/12;G01P15/125;H01L29/84 主分类号 G01P15/12
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