| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device enabling detection of a mark provided on the rear surface of a substrate using a position detection system installed on the surface side of the substrate, for example, such as a wafer.SOLUTION: A substrate holding device having the rear surface of a substrate includes: a substrate holding member having a contact part in contact with the rear surface of the substrate; a first optical system which illuminates a mark provided on the rear surface of the substrate with light from a light source; and a second optical system which guides reflection light from the mark to the surface side of the substrate holding member and forms a spatial image of the mark. The first optical system and the second optical system are housed in the inside of the substrate holding member. |
