INSPECTION DATA ACQUISITION METHOD AND VISUAL INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To accurately detect unevenness and dirt of a surface of an inspection workpiece with a simple structure.SOLUTION: A visual inspection apparatus of an embodiment comprises: imaging means for taking an image of an inspection surface of an inspection workpiece; lighting means having area light sources whose irradiation ranges for the inspection surface overlap each other and a slit light source; control means for controlling imaging and switching of turn-on/turn-off of the area light sources and the slit light source; and inspection data acquisition means for acquiring a two-dimensional image of the inspection workpiece on the basis of an image taken during the period the slit light source is switched to be turned off and for acquiring a three-dimensional height data of the inspection workpiece on the basis of an image taken during the period the slit light source is switched to be turned on.