SUBSTRATE TREATMENT DEVICE, TEMPERATURE MEASUREMENT SYSTEM, METHOD FOR MEASURING TEMPERATURE OF TREATMENT DEVICE, TRANSPORTATION DEVICE, AND MEMORY MEDIUM

摘要

In order to improve the workability of measuring the temperature soaking region in the treatment furnace and improve the reliability of the soaking length of the heater, this invention provides a substrate treatment device having: a treatment chamber for treating a substrate loaded in a state of being held by a holding tool; a temperature measuring instrument for measuring the temperature in the treatment chamber; a transportation device for transporting the substrate at least to the holding tool; and a controller for moving the transportation device to a preset position before the temperature in the treatment chamber is measured, and acquiring the temperature from the temperature measuring instrument while raising/lowering the transportation device in a state in which the temperature measuring instrument is attached when the temperature in the treatment chamber is measured.