SUBSTRATE PLACING APPARATUS AND SUBSTRATE PLACING METHOD

摘要

The present invention is provided with: a substrate plate having a mounting surface for mounting a substrate thereon; and a substrate mounting apparatus for mounting the substrate on the mounting surface of the substrate plate. The substrate mounting apparatus is provided with: a substrate holding mechanism, which holds the substrate, and which is provided with a substrate heating mechanism for heating the substrate; a substrate moving mechanism, which moves the substrate onto the mounting surface such that the substrate main surface faces the mounting surface, said substrate being held by means of the substrate holding mechanism; and a substrate rotating mechanism, which rotates the substrate on the mounting surface.