摘要 |
<p>A method for coating a substrate by means of a cathode arrangement including at least two rotatable cathodes is disclosed. The method includes rotating at least one of the at least two rotatable cathodes in a first direction, and, at the same time, rotating at least one of the at least two rotatable cathodes in a second direction. The first direction is opposite to the second direction. Furthermore, a controller for controlling a coating process is disclosed. Furthermore, a coater for coating a substrate is disclosed. The coater includes a cathode arrangement with at least two rotatable cathodes and a controller as disclosed herein.</p> |
申请人 |
APPLIED MATERIALS, INC.;SCHEER, EVELYN;HANIKA, MARKUS;SCHWANITZ, KONRAD;PIERALISI, FABIO;KLOEPPEL, ANDREAS;LIU, JIAN;LOPP, ANDREAS |
发明人 |
SCHEER, EVELYN;HANIKA, MARKUS;SCHWANITZ, KONRAD;PIERALISI, FABIO;KLOEPPEL, ANDREAS;LIU, JIAN;LOPP, ANDREAS |