| 摘要 |
<p>[Problem] To suppress variations in measurement result, which are caused by minute changes in the direction of pressure. [Solution] The sectional line of a protrusion (46A) in each of two partial regions (41alpha, 41beta) disposed on both sides of a through-hole (11) in the section of a piezoelectric substrate (41) including the central axis (S) of the through-hole (11) is formed in an arc shape protruding to the outside of the piezoelectric substrate (41) along a direction parallel to the central axis (S), and even when the direction in which pressure is applied slightly changes, the pressure is repeatedly applied concentratedly to the top of the protrusion (46A).</p> |
