| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source with improved temperature control which allows an arc chamber housing to be made of an inexpensive and light aluminum alloy and allows a wider range of the operating range of source power.SOLUTION: An ion source comprises an arc chamber housing 76 made of an aluminum alloy, and a source block 120. The operating temperature of the arc chamber housing is kept within the range from 400°C to 550°C inclusive. For this purpose, heat conduction between the source block and the arc chamber housing is promoted by use of gaskets 260, 262 of low thermal resistance material, and the arc chamber housing is provided with resistance heater elements and a temperature sensor to control temperature. |
