ULTRASOUND TRANSDUCER, ULTRASOUND PROBE, AND ULTRASOUND INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an ultrasound transducer which has good transmitting and receiving characteristics and prevents the damage of an opening corresponding portion of a support film, and to provide an ultrasound probe and an ultrasound inspection device.SOLUTION: An ultrasound probe 10 comprises: a substrate 2 having an opening 21; a support film 5 provided on the substrate 2 and closing the opening 21; and a piezoelectric element provided at an area which is located on the support film 5 and on an opening corresponding portion overlapping with the opening 21 in a plane view. A thickness of a center part of the opening corresponding portion of the support film 5 is thinner than a thickness of an outer edge part of the opening corresponding portion of the support film 5. Further, the opening corresponding portion of the support film 5 has a portion where a thickness gradually increases from the center part side to the outer edge part side of the opening corresponding portion of the support film 5.