THIN FILM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of detecting the position of a substrate in a short time.SOLUTION: A substrate provided with an object to be detected is held on a holding surface of a stage. A detection device is installed in the stage. The detection device detects the position of the object to be detected of the substrate held on the holding surface. Droplets of a thin film material are discharged from a plurality of nozzle holes formed in a nozzle unit to a surface of the substrate held on the holding surface of the stage.