| 发明名称 |
CMP PAD CONDITIONING TOOL |
| 摘要 |
The present disclosure provides a CMP pad conditioning tool with at least one integral abrasive protrusion. The present disclosure further provides a method for preparing this CMP pad conditioning tool, along with a method for using said tool to condition a CMP pad. |
| 申请公布号 |
KR20130132480(A) |
申请公布日期 |
2013.12.04 |
| 申请号 |
KR20137015870 |
申请日期 |
2011.12.20 |
| 申请人 |
DIAMOND INNOVATIONS, INC. |
发明人 |
RULAND GARY E.;RAREY CHARLES;EASLEY THOMAS CHARLES;GRAHAM JAMES;SCHWEIZER MARK |
| 分类号 |
B24D18/00;B24B53/017;B24D3/06;B24D3/34;B24D7/02 |
主分类号 |
B24D18/00 |
| 代理机构 |
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