发明名称 Manufacturing method of a three-dimensional microstructure
摘要 A method for manufacturing a three-dimensional structure (1) includes forming a first structure (20) having a relief pattern on a substrate (10), forming a sacrifice layer (30) on the first structure such that the sacrifice layer can be filled in a concave part (25) of the first structure and the sacrifice layer can cover a surface (23) of a convex part (22) of the first structure on a side opposite to the substrate, forming a second structure (40) having a relief pattern on the sacrifice layer, and a fourth step of removing the sacrifice layer from between the first structure and the second structure, and thereby bringing the second structure into contact with the surface of the first structure.
申请公布号 EP2133307(A3) 申请公布日期 2013.12.04
申请号 EP20090161797 申请日期 2009.06.03
申请人 CANON KABUSHIKI KAISHA 发明人 ISANO, TAISUKE;ASANO, KOSUKE;KANEDA, YASUSHI
分类号 B81C1/00 主分类号 B81C1/00
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