| 摘要 |
PURPOSE: A plasma reactor with multiple discharge tubes is provided to respectively activate different gas in two or more independent discharge zones and individually supply the different gas to a process chamber, thereby improving the process efficiency. CONSTITUTION: An upper hollow discharge tube (11) has a gas inlet (14). A lower hollow discharge tube (12) has a gas outlet (15). Multiple discharge tube bridges (13) connect the upper and lower discharge tubes. A transformer-coupled plasma source (20) is mounted onto the discharge tube bridge and has a magnetic core (22) to which a primary coil (21) is wound. An alternating current (AC) switching power source (32) supplies plasma generating power to the primary coil. |
