发明名称 Polycrystalline ingot growth equipment
摘要 PURPOSE: An apparatus for growing a polycrystalline ingot is provided to obtain the polycrystalline ingot with high quality by inducing the growth of nucleus in the bottom of a crucible in which the growth of fused raw materials begins. CONSTITUTION: An apparatus for growing a polycrystalline ingot includes a chamber, a heater(110), a crucible, a susceptor(130), a crucible supporter, and a heat exchanger. A heat discharge groove and a heat discharge hole are formed in the same location of the crucible, the susceptor, or the crucible supporter facing the heat exchanger.
申请公布号 KR101336748(B1) 申请公布日期 2013.12.04
申请号 KR20110034875 申请日期 2011.04.14
申请人 发明人
分类号 C04B35/01;C30B28/06;H01L21/02 主分类号 C04B35/01
代理机构 代理人
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