发明名称 Sample holder for ion beam processing apparatus
摘要 PURPOSE: An ion milling sample holder is provided to fix a sample stably by forming a small jaw in a clamp part. CONSTITUTION: A bottom clamp(12) is inserted into a sample installation device or an ion milling device. A pair of top clamps(15) includes a clamp plate(13) and a clamp rod(14). The top clamp pushes both sides of the sample from the top. A spring(16) and a pin(17) are combined with the clamp rod. The spring and the pin pull the top clamp.
申请公布号 KR101335064(B1) 申请公布日期 2013.12.03
申请号 KR20110126444 申请日期 2011.11.30
申请人 发明人
分类号 G01N1/36;H01J37/20 主分类号 G01N1/36
代理机构 代理人
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