STATE OF THE ART CONSTANT FLOW DEVICE,申请号SG20010005764-传众专利搜索

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发明名称	STATE OF THE ART CONSTANT FLOW DEVICE
摘要
申请公布号	SG98035(A1)	申请公布日期	2005.04.28
申请号	SG20010005764	申请日期	2001.09.21
申请人	CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.	发明人	KAM BENG CHONG;CHIN CHOON KHEE;CHUA KIEN HENG;TEH GUAT CHENG
分类号	B24B57/02;B08B3/04;G05D7/06;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B08B	主分类号	B24B57/02
代理机构		代理人
主权项
地址

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