| 摘要 |
PURPOSE: A wafer positioning apparatus is provided to improve detection accuracy of an optical sensor by matching the center of the wafer with the center of a mount stage. CONSTITUTION: A mount stage(22) horizontally holds a wafer(W). A rotation driver(20) rotates the mount stage around a vertical axis. A wafer guide device(30) guides the periphery of the wafer held on the mount stage. The wafer guide device approaches or separates from the mount stage. A gas discharge unit is formed on the mount stage and discharges to raise the wafer of the wafer guide device from the mount stage. A peripheral position detector detects the peripheral position of the wafer on the mount stage. A controller rotates the wafer by controlling the rotation driver when the gas is not discharged from the gas discharge unit. |
