发明名称 |
Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method |
摘要 |
Disclosed herein is an apparatus including: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container; a positioning pin projecting from the table and adapted to engage with the positioning groove of the container; a nozzle configured to charge the gas into the container through the charging inlet; and a drive unit configured to move the nozzle into contact with the charging inlet of the container after the positioning pin is engaged with the positioning groove. |
申请公布号 |
US8596312(B2) |
申请公布日期 |
2013.12.03 |
申请号 |
US201113038978 |
申请日期 |
2011.03.02 |
申请人 |
NATSUME MITSUO;OCHIAI MITSUTOSHI;MIZOKAWA TAKUMI;SINFONIA TECHNOLOGY CO., LTD. |
发明人 |
NATSUME MITSUO;OCHIAI MITSUTOSHI;MIZOKAWA TAKUMI |
分类号 |
B65B1/04;B65B31/04;H01L21/67;H01L21/677 |
主分类号 |
B65B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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