发明名称 |
Exhausting method and gas processing apparatus |
摘要 |
An exhausting method includes determining an exhaust flow rate of a process gas to be a predetermined value that is less than or equal to a gas flow rate corresponding to a maximum process capability of a purification system when the process gas is diluted to a lower explosive limit; calculating a pressure drop amount per unit time to maintain the determined exhaust flow rate of the process gas, based on a relation between the exhaust flow rate and the pressure drop amount per unit time; and evacuating an inside of the chamber to maintain the determined exhaust flow rate, while controlling the pressure through an automatic pressure control valve by setting a target pressure value to be updated as a control value of the automatic pressure control valve at every predetermined time interval so as to achieve a calculated pressure drop amount per unit time. |
申请公布号 |
US8597401(B2) |
申请公布日期 |
2013.12.03 |
申请号 |
US201113205077 |
申请日期 |
2011.08.08 |
申请人 |
AMIKURA NORIHIKO;MIYOSHI RISAKO;TOKYO ELECTRON LIMITED |
发明人 |
AMIKURA NORIHIKO;MIYOSHI RISAKO |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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