发明名称 |
Method for forming a concavo-convex pattern and a method of manufacturing a patterned medium type magnetic recording medium |
摘要 |
The invention provides a method of forming a concavo-convex pattern by partly removing a magnetic layer and a carbon protective layer in an intermediate product of a magnetic recording medium having at least the magnetic layer and the protective layer formed on a substrate surface, wherein the magnetic layer is partly removed to form the concavo-convex pattern by a dry etching method using a etching gas of a mixture gas of argon and a deposition gas containing one or more types of carbon compounds. Also disclosed is a method of manufacturing a patterned medium type magnetic recording medium employing the method of forming a concavo-convex pattern. As a result a concavo-convex pattern free of after-corrosion and exhibiting good productivity is provided. |
申请公布号 |
US8597527(B2) |
申请公布日期 |
2013.12.03 |
申请号 |
US20090548058 |
申请日期 |
2009.08.26 |
申请人 |
TANIGUCHI KATSUMI;FUJI ELECTRIC CO., LTD. |
发明人 |
TANIGUCHI KATSUMI |
分类号 |
B44C1/22 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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