THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME

摘要

A semiconductor pattern including oxide semiconductor material is formed on a substrate. A first line pattern including a source electrode and a drain electrode separated from the source electrode is formed on the semiconductor pattern. A second line pattern including the gate electrode formed on the upper part of the source and the drain electrode and formed on the insulating pattern. A conduction pattern including an pixel electrode electrically connected to the drain electrode and formed on the insulating paten.