| 摘要 |
A three-dimensional shape measuring device comprises a lighting part, a projecting part, two or more camera parts, and a central processing part. The lighting part irradiates, with light, a measured object arranged on one side of a substrate. The projecting part irradiates the measured object with grid-patterned light. The camera parts obtain plane images of the measured object by receiving the reflection light of the light emitted from the lighting part to the measured object, and patterned images of the measured object by receiving the reflection light of the grid-patterned light emitted from the projecting part to the measured object. The central processing part calculates the height data of the measured object using the patterned images of the measured object obtained by the camera parts if the height is less than a reference height. If the height is over the reference height, the central processing part calculates the height data of the measured object using the image-formed positions of the plane images of the measured object obtained by the camera parts while matching the plane coordinates of the plane images using the phase or gray scale value of the patterns which are displayed on the pattern images obtained by the camera parts. Accordingly, the present invention expands the range of the height to be measured, and accurately and easily obtains a matching point in a stereo measuring method. |
