| 摘要 |
PROBLEM TO BE SOLVED: To provide a protective member which allows reliable sticking of an annular adhesive layer laid on a protective tape to the periphery of a wafer, and to provide a protective tape sticking method.SOLUTION: The protective member for sticking a protective tape, having a diameter corresponding to that of a wafer and provided with an annular adhesive layer only on the periphery of the front surface corresponding to that of the wafer, to the wafer includes a beltlike sheet where an adhesive layer having an area larger than that of the protective tape and an adhesive power weaker than that of the annular adhesive layer of the protective tape is laid on the front surface and peeling treatment is performed on the back surface. The back surface of the protective tape is stuck to the front surface of the beltlike sheet at a predetermined interval, and the beltlike sheet and a plurality of protective tapes are wound in a roll state. |
